Failure Mechanisms in MEMS
نویسنده
چکیده
MEMS components by their very nature have different and unique failure mechanisms than their macroscopic counterparts. This paper discusses failure mechanisms observed in various MEMS components and technologies. MEMS devices fabricated using bulk and surface micromachining process technologies are emphasized.
منابع مشابه
MEMS reliability from a failure mechanisms perspective
Over the last few years, considerable effort has gone into the study of the failure mechanisms and reliability of microelectromechanical systems (MEMS). Although still very incomplete, our knowledge of the reliability issues relevant to MEMS is growing. This paper provides an overview of MEMS failure mechanisms that are commonly encountered. It focuses on the reliability issues of micro-scale d...
متن کاملOn the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies
This paper reviews the state of the art knowledge related to critical failure mechanisms in electrostatic microand nano-electromechanical systems (MEMS and NEMS) which are the dielectric charging and stiction. It describes also the recent employed nanoscale characterization techniques for these phenomena based on Kelvin probe force microscopy (KPFM) and force–distance curve measurements. The in...
متن کاملSuppression of Stiction in MEMS
Stiction failures in microelectromechanical systems (MEMS) occur when suspended elastic members are unexpectedly pinned to their substrates. This type of device failure develops both in fabrication and during device operation, being a dominant source of yield loss in MEMS. Stiction failures require first a collapse force that brings the elastic member contact with the substrate followed by an i...
متن کاملReliability of MEMS: A perspective on failure mechanisms, improvement solutions and best practices at development level
Reliability of MEMS (MicroElectroMechanical-Systems) devices is a crucial aspect as it can discriminate the successful from partially or totally missed reaching of Microsystem technology based market products. However, the topic of MEMS reliability is significantly articulated, as it comprises numerous physics of failure and diverse failure mechanisms. Thereafter, it requires a pronounced sensi...
متن کاملMEMS Reliability Assessment Program – Progress to Date
As the Army transforms into a more lethal, lighter and agile force, the technologies that support these systems must decrease in size while increasing in intelligence. Microelectromechanical systems (MEMS) are one such technology that the Army and DOD will rely on heavily to achieve these objectives. The MEMS devices within these systems will be required to last as long as the lifetime of the w...
متن کامل